Simulation of Nanopattern Formation of Si Surface due to Ion Irradiation

Sarwar H. Ali, S. R. Saeed

Faculty of Science and Educational Science, University of Sulaimani, 2 Faculty Education - Chamchamal, University of Sulaimani

Energetic ion irradiation induce surface nano-scale patterns formation, ripple or wavelike
pattern is one of the surface morphologies. Analytical solution of the BH continuum equation, using
MATLAB applied on Si target, well-defined ripple structure were observed as a function of
different parameters such as angle of ion incidence, ion energy, ion flux, ion species, and thermal
diffusion coefficient

Keywords: ion irradiation; Bradley-Harper theory; surface nanopattern.

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