Simulation of Nanopattern Formation of Si Surface due to Ion Irradiation

Authors

  • Sarwar H. Ali Faculty of Science and Educational Science, University of Sulaimani, Kurdistan Region, Iraq. Author
  • S. R. Saeed Faculty of Education, Chamchamal, University of Sulaimani, Kurdistan Region, Iraq. Author

DOI:

https://doi.org/10.17656/jzs.10282

Keywords:

Ion irradiation, Bradley-Harper theory, Surface nanopattern

Abstract

Energetic ion irradiation induce surface nano-scale patterns formation, ripple or wavelike pattern is one of the surface morphologies. Analytical solution of the BH continuum equation, using MATLAB applied on Si target, well-defined ripple structure were observed as a function of different parameters such as angle of ion incidence, ion energy, ion flux, ion species, and thermal diffusion coefficient

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Published

2014-01-27

How to Cite

Simulation of Nanopattern Formation of Si Surface due to Ion Irradiation. (2014). Journal of Zankoy Sulaimani - Part A, 16(1), 29-36. https://doi.org/10.17656/jzs.10282