Simulation of Nanopattern Formation of Si Surface due to Ion Irradiation


  • Sarwar H. Ali Faculty of Science and Educational Science, University of Sulaimani, Kurdistan Region, Iraq. Author
  • S. R. Saeed Faculty of Education, Chamchamal, University of Sulaimani, Kurdistan Region, Iraq. Author



Ion irradiation, Bradley-Harper theory, Surface nanopattern


Energetic ion irradiation induce surface nano-scale patterns formation, ripple or wavelike pattern is one of the surface morphologies. Analytical solution of the BH continuum equation, using MATLAB applied on Si target, well-defined ripple structure were observed as a function of different parameters such as angle of ion incidence, ion energy, ion flux, ion species, and thermal diffusion coefficient


. Behrisch, Rainer, and Wolfgang Eckstein (1981) Sputtering by Particle Bombardment I, DOI:

Springer-Verlag Berlin Heidelberg.

. Wasa, K., Makoto K. and Hideaki A. (2004) Thin film Materials Technology Sputtering of DOI:

Compound materials, William Andrew, Inc.

. Wang, Y., Yoon S.F., Ngo C.y., and Ahn J. (2007)"Surface morphology evolution of

GaAs by low energy ion sputtering", Nanoscale Research Letters 2: 504-508.

. Sanchez-Garcia, J. A., Gago R., Caillard R., Redondo-Cubero A., Martin-Gago J.A.,

Palomares F.J., Fernandez M., and Vazquez L. (2009) "Production of nanohole/nanodot

patterns on Si (001) by ion beam sputtering with simultaneous metal incorporation",

Journal of Physics: Condensed Matter 21: 224009.

. Zhao, Guiping (2007) "Fabrication and characterization of nanowire arrays on InP (100)

surfaces", Ph.D. dissertation, Newcastle University, England.

. Zhou, Hua (2007) " Ion Beam Erosion-Induced Self-organized Nanostructures on

Sapphire", Ph.D. disseration, University of Vermont, United State.

. Chini, T.K., Okuyama F., Tanemura M., and Nordlund K. (2003) "Structural investigation

of keV Ar-ion-induced surface ripples in Si by cross-sectional transmission electron

microscopy", Physical Review B 67: 205403.

. Bradley, R. and James M.E. Harper (1988)" Theory of ripple topography induced by ion DOI:

bombardment", Vacuum Science and Technology A 6: 2390-2395.

. Zhou, Hua, Yiping Wang, Lan Zhou, Randall Headrick L., Ahmet S. Ozcan, Yiyi Wang,

Gozde Ozaydin, Karl F. Ludwig, Jr., D. Peter Siddons (2007) "Wavelength tunability of

ion-bombardment-induced ripples on sapphire", Physical Review B 75: 155416.

. Park, S., Kahng B., Jeong H., and Barabasi A.-L. (1999) "Dynamics of ripple formation in

sputter erosion: nonlinear phenomena", Physical review letters 83: 3486.

. Cuerno, Rodolfo and Albert-Laszlo Barabasi (1995) "Dynamic scaling of ion-sputtered DOI:

surfaces", Physical review letters 74: 4746.

. Makeev, Maxim A., and Rodolfo C., and Albert-Laszlo Barabasi (2002) "Morphology of

ion-sputtered surfaces", Nuclear Instruments and Methods in Physics Research Section B

: 185-227.

. Javier, Munoz-Garca, Mario C., and Rodolfo C., (2006) "Nonlinear ripple dynamics on

amorphous surfaces patterned by ion beam sputtering", Physical review letters 96:

. Sigmund P., (1969) "Theory of sputtering. I. Sputtering yield of amorphous and DOI:

polycrystalline targets", Physical review 184: 383.

. Liedke, Bartosz (2011) "Ion beam processing of surfaces and interfaces –Modeling and

atomistic simulations-", Ph.D. dissertation, Dresden University of Technology, German.

. Hartmann, Alexander K.m and Reiner K., and Taha Y. (2009) "Simulating discrete

models of pattern formation by ion beam sputtering", Journal of Physics: Condensed

Matter 21: 224015.

. Chini, T.K., Sanyal M.K., and Bhattacharyya S.R. (2002) "Energy dependent wavelength

of the ion induced nanoscale ripple", Physical Review B 66: 153404.

. Bhattacharjee, S., Karmakar P., and Chakrabarti A., (2012) "Key factors of ion induced

nanopatterning", Nuclear Instruments and Methods in Physics Research Section B: Beam

Interactions with Materials and Atoms 278: 58-62.

. Erlebacher, Jonah., Michael J., Eric C., Michael B., and Jerrold A. (1999) "Spontaneous

pattern formation on ion bombarded Si (001)", Physical review letters 82: 2330. DOI:

. Das, Kallol (2010) 'Effect of irradiation parameters on the surface pattern evolution in

silicon due to ion bombardment", M.Sc. thesis, University of Illinois, Urbana-Champaign.

. Keller, Adrian, Rodolfo Cuerno, Stefan Facsko, and Wolfhard Moller (2009) "Anisotropic

scaling of ripple morphologies on high-fluence sputtered silicon", Physical Review B 79:

. Fulga, Florin, and Dan V. Nicolau (2010) "Simulation of the nanostructuring of surfaces

under ion-beam bombardment", Microelectronic Engineering 87: 1455-1457.

. Marina, Ines Cornejo (2011) "Pattern Formation on Si surfaces by low-energy ion beam

erosion", Ph.D. dissertation, university of Saarlandes, Saarbrucken/ Leipaig.

. Madi, Charbel Said (2011) "Linear stability and instability patterns in ion bombarded

silicon surfaces", Ph.D dissertation, Harvard University, Cambridge, Massachusetts.

. Liu, Z.X., and P.F.A. Alkemade (2001) "Flux dependence of oxygen-beam-induced ripple DOI:

growth on silicon", Applied Physics Letters 79: 4334-4336.

. Ziberi, B., F. Frost, Th. Hoche, and B. Rauschenbach (2005) "Ripple pattern formation on

silicon surfaces by low-energy ion-beam erosion: Experiment and theory", Physical

Review B 72: 235310.

. Brown, Ari-David (2005) "Studies of ion sputtered silicon (111) surfaces", Ph.D

dissertation, Johns Hopkins University, Baltimore, Maryland.



How to Cite

Simulation of Nanopattern Formation of Si Surface due to Ion Irradiation. (2014). Journal of Zankoy Sulaimani - Part A, 16(1), 29-36.