Miscut measuring of SrTiO3 single crystal using high resolution X-ray diffraction
DOI:
https://doi.org/10.17656/jzs.10398Keywords:
Strontium titanate (SrTiO3) High resolution X-ray diffraction Substrate Thin films MiscutAbstract
Strontium titanate (SrTiO3) is one of the perovskite type metal oxides with multifunctional properties and it has a lot of applications in various sectors of technology. In
this paper, we obtained the miscut angles from Bragg peak after performing ω scans of
HRXRD at different angles of φ with intervals of 90○. The obtained results located
between 0.2015○ and 0.4302○ using two ways (mathematically and Epitaxy software),
which is considered as a tolerance limit (less than 1°) to cut the substrates.
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